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APMS

Adixen Predictive Maintenance System

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Thanks to an effective Central Monitoring System, Adixen has collected extensive pump data from worldwide installed bases over several years. From this data, and understanding our customer’s needs, we have developed a software, based on Adixen propriety algorithms, for real time predictive maintenance.

The introductory package is dedicated to predicting future failure of pumps due to silencer, exhaust line or scrubber clogging. The production team is informed in advance of failure, allowing to stop the process at a suitable time to take corrective action and prevent expensive wafer loss.  It is a stand alone system supported by Adixen’s Central Monitoring PC.

As the introductory package regards the exhaust clogging detection, other developments are under going for the system to be able to identify other failure modes on pumps and scrubbers. Therefore, it is important to introduce the system already in its first basic version to the customers, in order for them to get familiar and confident to the concept of predictive maintenance.

For compatibility, the software has to be installed on PC’s equipped with at least 3.0012 CMS version. The delivery package includes the exhaust clogging APMS software installation CD with the activation key and the user manual in English.

Key benefits

Automatic Warnings

The warnings are fully automated in real time and relayed to on duty staff via the central monitoring PC’s or office PC’s. With our system, we can also automatically e-mail relevant people or send an SMS message to mobile phones, guaranteeing that people are always informed on-time.

Process Flexibility

Clogging signatures vary depending on process by-product composition and exhaust line design. For accuracy, algorithm variables can be adjusted accordingly for every pump installation.

Warning Timings

The warnings can be set from a few hours to several days notice before the clogging reaches a critical level. This is subject to the customer’s preference and criticality of the process.

APMS
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Related applications :

Semiconductor
Semiconductor


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