Analytical Instrumentation & Research

- Electron microscopy
- Optical spectrometry
- Surface area analysis

Industry

- Electron tubes

Hybrid Turbomolecular Pumps

ATH Series

For a Quote
Email: contact@pfeiffer-vacuum.com

Features:

• Hybrid Pumps

* High N2 compression >10⁹

* High exhaust pressure tolerance >4mbar

• 200-300 l/s pumping speed, N₂

•Standard, Corrosive, Interstage Port and Nude versions

•Grease lubricated ceramic ball bearings

•Adjustable rotational speed

•DN63, DN100 and DN160 flange sizes

•CFF or ISOK flange type

Benefits:
• Flexible intermediate pumping
* Utilize a less expensive gauge or back another turbo
• High exhaust pressure tolerance

* Low cost backing pump

• Nude versions provide

* Cost and space savings, improved performance

• Low ultimate pressure down to 10^-10 mbar

• Mountable in any orientation

• Robust - machined rotors and stators

• Low rotational speed - less sensitive togyroscopic affect

Applications:

• Mass spectrometry

• Leak detectors

• Electron microscopes

• R&D

• General low inlet pressure requirements

• Deposition

Ready to Order? Call 1-781-331-4200

Would you like to discuss your application with an expert?

Call 408-956-2578 x309 or email us at: contact@pfeiffer-vacuum.com