Mid size maglev hybrid turbomolecular pump
ATH 2303 M
Adixen's ATH 2300 M turbomolecular pump has proven its robustness mostly in semiconductor harsh applications.
A new design of ATH 2303 M Maglev hybrid turbomolecular pump with pump mounted controller is introduced for cost effective installation for non-heated application with pump mounted electronic controller OBC v4. This compact pre-assembled pumping package provides high pumping speed, throughput, and reliability in a 5-axis maglev design offering in DN200 and DN250.
A new design of ATH 2303 M Maglev hybrid turbomolecular pump with pump mounted controller is introduced for cost effective installation for non-heated application with pump mounted electronic controller OBC v4. This compact pre-assembled pumping package provides high pumping speed, throughput, and reliability in a 5-axis maglev design offering in DN200 and DN250.
Connect the pump to a chamber, provide power, cooling water and communication and start processing.
Customer benefits and key features:
• No cables required between the pump and controller
• Compact footprint
• Proven robust design offers high reliability
• Active, 5-axis magnetic bearing control system results in zero process contamination, low noise and vibration levels
• Adjustable rotational speed allows performance optimization
• Mountable in any orientation
• Compound rotor design provides high pumping speed and foreline pressure tolerance, resulting in roughing pump cost savings
• No scheduled bearing maintenance
• Factory assembly and test reduces installation time
