Maglev hybrid turbomolecular pump series

High throughput applications
Adixen's Maglev series (from ATH 500 M to ATH 3200 M) are designed for high pressure, high throughput and robust pumping needed for industry applications such as semiconductor, FPD, coating, photovoltaic and other applications.

Corrosion proof features
• Automatic balancing system
• Built-in 75°C heating system
• 5 active axes
• Inert gas purge

A compact and modern design
• On board controler and rack controler for all installation  needs
• Adjustable rotational speed for optimizing pumping parameters
• Very high MTBF
• Low cost of ownership
• Low noise and vibration levels
• Battery free

Applications
• Semiconductor processes (etch, CVD, ion implant),
• Flat panel display manufacturing,
• Photovoltaic manufacturing,
• Glass coating,
• Coating and thin films deposition,
• Micro systems machining,
• Lithography
• Ion beam rectification,
• Electron microscopy,
• Space simulation chambers,
• Particle accelerators,
• Ion milling
• And many R&D experiments

Ready to Order?  Call 1-781-331-4200