Product

New Maglev hybrid turbomolecular pump

ATH 3200M

High flow pump with a DN320 flange

For a Quote
Email: Research@adixen-usa.com

The ATH3200M is designed for vacuum applications that require high pumping speed combined with high gas throughput up to 5000 sccm N2.

The pump performance makes it suitable for light and harsh processes including 300 mm Semiconductor, Flat Panel Display, Photovoltaic, Coating, R/D and space simulation applications.

Ready to Order?  Call 1-781-331-4200 

Would you like to discuss your application with an expert?

Call us at 781-682-1201 or email us at: TurboPumps@adixen-usa.com

 

ATH 3200M

Documentation :

Download now See the ATH 3200 M Flyer Download
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Related applications :

Semiconductor
Semiconductor

Flat Panel Display & Photovoltaic
Flat Panel Display & Photovoltaic


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