Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of high capacity dry pumps covering all requirements of G4 to G9 FPD fabsand Silicon or Thin Film based technology photovoltaic cells manufacturing. Light process :
Key requirements for such applications are fast pump down, limited noise level and robustness.
The ADKL range offers :
• high performance (30 sec from atmosphere to 10-1 mbar on a 1000 liters volume for AD70KL, ultimate pressure lower than 10-3 mbar with adequate option),
• low energy consumption thanks to a unique automatic boost / stand-by mode and low utilities consumption
• low footprint (< 1 m²)
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