Adixen monitoring systems are tailored to meet your specific needs, including solution configuration, implementation and maintenance.
Our customized products will enable you to increase your effectiveness with full on-site support, prevent downtime through preventive maintenance and back-up management and benefit from a continuous improvement. APS 500 :
Advanced solution for the semiconductor industry
Real time on-line process monitoring
The Adixen APS 500 provides chemistry monitoring by creating its own plasma light. It can therefore be located where the light from a plasma is not available: in vacuum lines, turbo-pump exhausts, process or transfer chambers, any location with a pressure between 10-3 mbar and 10 mbar. It is ideal for chamber matching, process diagnostics, repeatability measurements and other studies.
A versatile sensor that helps you understand and optimize
The Adixen APS 500 helps process engineers and scientists make "fingerprints" of their process equipment, detect drifts and defects, observe process steps and optimize processes to reduce running costs and increase yield.
|
