New Dry Pump A100V
Following the worldwide success of leading integrated pump A100L, A100V extends the possibilities of dry pump integration in semiconductor tools.
Based on A100L design, A100V provides high throughput and high reliability on cycling and other clean applications with 35% footprint reduction.
Compact, clean and quiet, A100V offers higher flexibility for on-tool integration and responds to the latest 300mm equipment pumping requirements.
A100V is qualified at major equipment suppliers of the Semiconductor industry.
A100V Key features
High performance in a low footprint
High reliability
Low noise
Low vibration
Semi S2-703 compliant
For more information, please see product information page.
