The Adixen ATP 2300 M is a 5 active axis maglev turbomolecular pump, that benefits from Adixen's 10 years of experience in Maglev pump design.
It has been specially designed for Hydrogen and light gas pumping. Its pumping capacity, above 1750 l/s with H2, makes it suitable for HDPCVD Dielectric and Ion Implant applications. Features include low vibration, small size (less than 300 mm high), and a low power consumption.