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Low power consumption process pumps
A3P Range Dry Pumps
The A3P range has been specifically designed to reduce operating costs.
Covering a wide range of pumping speeds from 100 m3/h to 1000 m3/h, the A3P range responds to every 300 mm medium process vacuum requirement at the lowest utility cost.
Covering a wide range of pumping speeds from 100 m3/h to 1000 m3/h, the A3P range responds to every 300 mm medium process vacuum requirement at the lowest utility cost.
-Low cooling water requirements
-As much as 50% power consumption savings
-Reduced N2 purge
-Compact footprint provides flixibility in sub fabs
Features:
• Low utility costs: only 1.5 kW for a 1000 m3/h pump
• Compact design: only 310 mm wide
• Multi-stage roots technology
• Corrosion resistant
• Low noise
• Low vibration
• Semi S2-0706 compliant
Benefits:
• Reduced cost of ownership
• Low footprint, save space in fab basement
• High reliability
• Semiconductor fab rules compliant
Applications:
• Etch (oxide, Poly)
• RTP
• Strip / Ashing
• Implant source
For more information and complete specifications:
For a quote today.
Email us at: contact@pfeiffer-vacuum.com
Ready to Order? Call 1-781-331-4200
Would you like to discuss your application with an expert?
Call Josh at 480-363-2045
or email us at: contact@pfeiffer-vacuum.com
