Large dry pumps for harsh process

Based on the field proven technology developed over the last 15 years in the semiconductor industry, Adixen has developed a new high capacity dry pump series able to answer the needs of harsh Solar & FPD process applications, such as PECVD SiN, MOCVD or semiconductor processes such as ALD, ...

This range is composed of 3 versions: AD43KH, AD63KH and AD103KH depending on required pumping speed.

Key features
• High pumping speed (up to 5,100 m3/h)
• High Volume/Flow version 
   o Evacuation of volume sizes up to 10 m3
• High continuous H2 flow
• Low footprint
• Low CoO
   o Reduced power consumption
   o Low cooling water requirements
   o Modular concept for flexibility and easier layout management

Benefits
• The AD3KH range uses the well proven multistage Roots technology, one of the lowest energy consumption technologies on the market
• NF3 cleans compatible (special seals and cast iron materials)
• Highest protection against powder and highly corrosive gases
• Compatible with field monitoring networks
• Separated wheel mounted frame for easy maintenance

Applications:
• FPD manufacturing processes
• Photovoltaic cell processing (ARC, PECVD)
• Semiconductor Processes (ALD, TiN...)
• NF3 cleans compatible