ADKH range: large dry pumps for harsh processes

Based on the field proven technology developed over the last 15 years for the semiconductor industry, Alcatel proposes a new high capacity dry pump range able to answer the needs of FPD and Solar harsh process applications as PECVD.
This range is composed of 4 versions: AD30KH, AD40KH, AD70KH and AD100KH depending on required pumping speed.

Key features

• High pumping speed (up to 5,100 m3/h)
• Low footprint
• Low CoO
  o  Reduced power consumption
  o  Low cooling water requirements
  o  Easier layout management

Benefits

• The ADKH range is relying on the long time proven multistage roots technology, which provides one of the lowest energy consumption on the market
• NF3 compatible (special shaft and cast iron materials)
• Highest protection against powder and highly corrosive gases
• Compatible with fields monitoring networks
• Separated wheel mounted frames for easy maintenance 

Applications: 

• FPD manufacturing processes
• Photovoltaic cells processes
•  NF3 cleans compatible