Since 1999, the date of A100L introduction, the dry pump integration concept has become a standard in the semiconductor industry. The A100L dry pump is installed in every 300mm semiconductor plant in the world, providing recognized benefits to the key players of the industry.

Features:

• Direct integration on  wafer processing equipment:
Elimination of Foreline and significant reduction of facilities and hook-up costs

• 100 m3/h pumping speed at point of use:
Can replace up to 500 M3/H remote pumps increasing throughput

• Quiet and clean:
Designed for clean room operation

• Energy efficient:
Reduces fab energy consumption

• Reliable:
Adixen field proven mullti-stage roots technology

The largest installed base worldwide

Applications:

• Load-locks

• Transfer chambers

• PVD

• SEM

• Preclean chambers

• Anneal chambers