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Since 1999, the date of A100L introduction, the dry pump integration concept has become a standard in the semiconductor industry. The A100L dry pump is installed in every 300mm semiconductor plant in the world, providing recognized benefits to the key players of the industry.
Features:
• Direct integration on wafer processing equipment:
Elimination of Foreline and significant reduction of facilities and hook-up costs
• 100 m3/h pumping speed at point of use:
Can replace up to 500 M3/H remote pumps increasing throughput
• Quiet and clean:
Designed for clean room operation
• Energy efficient:
Reduces fab energy consumption
• Reliable:
Adixen field proven mullti-stage roots technology
The largest installed base worldwide
Applications:
• Load-locks
• Transfer chambers
• PVD
• SEM
• Preclean chambers
• Anneal chambers
For more information and complete specifications:
Prices by quote only.
Call 781-682-1214 for a quote today
or email us at: VacuumPumps@adixen-usa.com
Ready to Order? Call 1-781-331-4200
Would you like to discuss your application with an expert?
Call Steve at 781-682-1214
or email us at: VacuumPumps@adixen-usa.com