The A3P range has been specifically designed to reduce operating costs.

Covering a wide range of pumping speeds from 100 m3/h to 1000 m3/h, the A3P range responds to every 300 mm medium process vacuum requirement at the lowest utility cost.

-Low cooling water requirements

-As much as 50% power consumption savings 

-Reduced N2 purge

-Compact footprint provides flixibility in sub fabs

Features:

• Low utility costs: only 1.5 kW for a 1000 m3/h pump
• Compact design: only 310 mm wide
• Multi-stage roots technology
• Corrosion resistant
• Low noise
• Low vibration
• Semi S2-0706 compliant

Benefits:

• Reduced cost of ownership
• Low footprint, save space in fab basement
• High reliability
• Semiconductor fab rules compliant

Applications:

• Etch (oxide, Poly)
• RTP
• Strip / Ashing
• Implant source

For more information and complete specifications:

For a quote today.

Email us at: Research@adixen-usa.com

Ready to Order?  Call 1-781-331-4200 

 

Would you like to discuss your application with an expert?

Call Josh at 480-363-2045

or email us at: VacuumPumps@adixen-usa.com